SEM in UHV on Insulators
(Result of the month 11/2002)
ZnO nanocrystals: excellent resolution at low beam energy, 200 V
The UHV-Gemini column offers not only excellent resolution below 3 nm under typical SEM conditions, but also unsurpassed resolution at high currents and extremely low beam energies. The later has recently been used to image insulating surfaces. Even at beam energies as low as 200V, the resolution is still in the range of 10nm. Only at such low energies stable imaging was possible on such highly insulating samples. At higher beam energies charging effects where found to increase and lead to blurring of the images.


Diamond and ZnO samples were provided by Prof.T.Sekiguchi, Nanomaterials Lab., NIMS, Tsukuba, Japan;
SEM measurements were taken by G. Schäfer, Omicron Nanotechnology

 
This result has been obtained with :
MULTISCAN LAB
UHV Gemini Column

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