SAM Performance sub 10 nm

Ag clusters on silicon. Corresponding silver (352 eV) SAM image and line profile with sub-10 nm resolution.
Ag clusters on silicon. Corresponding silicon (92 eV) SAM image and line profile with sub-10 nm resolution.

 
This result has been obtained with :
MULTISCAN LAB
NanoSAM Auger Analyser

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In-situ SPM/SEM/SAM Solutions