Coloured SEM images
(Result of the month 07/2003)
Coloured SEM images of ultra-thin SiN "sheets" on a TEM sample holder, simultaneously acquired with the UHV-Gemini column. Left image: measured with "in-lens" SED. Rigth image: acquisition with conventional external SED. Depending on the beam energy and the selected SED detector, the thin sheets appear either opaque or transparent for the secondary electrons of the TEM mesh underneath.


Sample by courtesy of: Dr. T. Sekiguchi, Dr. J. Hu and Dr. Y. Bando Nanofabrication R.G., Nanomaterials Laboratory, National Institute for Materials Science Tsukuba, Japan Image acquisition: G. Schäfer, Omicron

 
This result has been obtained with :
MULTISCAN LAB
UHV Gemini Column
NanoSAM Lab

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