Maximum scan size:
typ. 2.3 μm × 2.3 μm

Coarse movement:
X travel: ± 5 mm
Z travel: 10 mm

Sample size:
max. 11mm x 11mm

Suspension resonance:
< 2 Hz

Tunnelling current:
20 pA – 50 nA

Maximum bake-out temperature:
180°C

Note: Specifications and descriptions contained in this website are subject to alteration without notice. For guaranteed specifications please inquire official documentation.