Hydrogen Cracker Source (HABS)
The Hydrogen Atom Beam Source HABS is a thermal gas cracker which produces an ion-free hydrogen gas beam to avoid ion induced damage of the substrate. In comparison to hydrogen sources based on electron bombardment heating the HABS is heated by a DC operated tungsten filament.
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Plasma Source (Nitrogen / Oxygen)
The growth of high-quality compound materials ideally require neutral, atomic species. Whereas molecular gases such as oxygen or nitrogen have shown to orders of magnitude less reactive than if dissociated into atomic form.
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Valved Arsenic Cracker Source
The Valved Arsenic Cracker Source is highly specialized for As4 or As2 sublimation and combines a large crucible capacity of 300 cm³ or 500 cm³ with precise and fast flux control.
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Valved GaP Compound Source
The Valved GaP Compound Source VGCS is a high purity P2-source, based on the decomposition of high purity GaP.
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Valved Alkali Metal Source
The Valved Alkali Metal Source AKS is designed for the evaporation of elemental high vapor pressure alkali metals like cesium (Cs) and rubidium (Rb) in standard MBE or UHV systems.
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Valved Corrosive Cracker Source for Sb, Te, Mg
The Valved Corrosive Material Cracker Source is designed for controlled injection of radicals of antimony, tellurium, magnesium or other corrosive materials in standard MBE applications.
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