MBE & Catalysis
Dedicated MBE thin film deposition and high pressure gas reaction cell system in combination with analysis (XPS, UPS, SPM, PEEM, EELS) for in-situ analysis of the catalysis process on a surface.
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Spintronics Cluster Tool
Dedicated MBE thin film deposition and high pressure gas reaction cell system in combination with analysis (XPS, UPS, SPM, PEEM, EELS) for in-situ analysis of the catalysis process on a surface.
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AR-XPS & LEISS/ISS
A wide range of extremely precisely controllable electron beam evaporators (EFM-Series) for ultra-thin film deposition using integrated flux-feedback control. Higher capacity and power versions (EBV-Series) for larger substrate sizes and high fluxes.
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