Piezo scanner type: single tube

Scan (and offset) range (X,Y,Z): 8 µm x 8 µm x 3 µm

Coarse movement: 6 x 6 mm for z and x, and rotation around y-axis;

Z - resolution: < 0.01 nm

Gap voltage range: ± 0.5 mV to ± 10 V

Tunnelling current set-point: 20 pA ... 50 nA (in-vacuum I/V converter)

Resonance of spring suspension: ~ 1 Hz (eddy current damping)

Sample size: max. 11 mm x 11 mm

Vacuum achievable: 10^-11 mbar range

Bakeout Temp.: max. 125°C

Note: Specifications and descriptions contained in this website are subject to alteration without notice. For guaranteed specifications please inquire official documentation.