RHEED

Integration

Omicron integrates RHEED guns from STAIB INSTRUMENTS for diffraction studies in the range of 15 to 30 keV. By combining electrostatic and magnetic elements, the gun produces a high brightness on a small size spot, with low beam divergence and with low outgassing rate. The gun mounts via  a 2.75” flange to the chamber. The optics are prealigned and do not need further adjustment. The RHEED system is fully bakeable. Operation at higher pressure requires the differential pumping option – either in  a single stage or dual stage differential pumping solution.

The power supply comes in a 19” rack mounted case and offers gun settings, such as energy, filament current, and beam intensity, which are displayed using digital readouts. The power supply is remote controlled by a compact control box to adjust the beam intensity, focus, and position.

The electron beam can be turned on and off using this option, keeping the electron load on the sample very low. The blanking signal can also be triggered synchronously with external signals to improve the use of RHEED in the presence of stray magnetic fields or to investigate rotating samples.

The fluorescent screen is available in various sizes, the screens are designed to reach high spatial resolution and best contrast. A protective aluminum coating ensures good electric contact, blocks stray light from inside the vacuum chamber, and improves the contrast of RHEED diagrams.

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Options

Beam rocking allows the precise adjustment and variation of the incidence angle using electronic controls, without moving the sample.

The standard electron gun is designed to operate at higher pressure, in the 10-4 Torr/mbar  range. The differential pumping option (TorrRHEED™) allows operation at higher pressure and/or with reactive gases.

Special shieldings for both - the source and the screen - are available to reduce the interaction with the RHEED system, e.g.originating from secondary electrons from an electron beam evaporator or or from magnetic systems being present inside the depositon chamber.

RHEED Vision is a powerful data acquisition tool adaptable to every existing RHEED system. Both image processing and real time analysis can be performed. All routines are simply selected through pull-down menus. A large number of data reduction routines are selectable. Additional hardware control modules are available, as for phase locked epitaxy, shutter controls, laser pulse triggering, Omicrons flexible and modular system design allows the extension of the deposition systems with powerful in-situ analysis tools. As an alternative solution the k-Space product range (kSA400, kSA BandIT, …) can be added to the RHEED systems.

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