• Complementary surface analysis at the very same sample area
• Goniometer mounted high stability sample stage
• UHV Gemini for SEM with lateral resolution below 3nm
• SAM with lateral resolution below 5nm
• Atomic resolution STM and QPlus AFM
• FIB, EBL, EBID for nanostructuring
• SEMPA for magnetic imaging
• Various alternative techniques: XPS, EBSD, CL, .....

The MULTISCAN LAB is the ultimate tool for the in-situ combination of various surface analysis techniques – simultaneously and on the very same sample spot. It is designed to combine highly resolved structural, chemical or magnetic analysis. A highly stable sample stage carries an atomic resolution STM/AFM, while simultaneous SEM enables rapid localisation and precise tip navigation on nanostructures. The independent coarse positioning for tip and sample is a prerequisite to perfectly align the analysis area of the SPM with SEM, SAM, SEMPA or other techniques. The goniometer mounted stage allows for tilting SPM and sample together in order to optimise the signal for techniques such as SAM, SEMPA, or EBSD.