Reposition accuracy: ± 15 % of travel; lateral, run-out better than ± 20 nm

Fully UHV-compatible, Bakeable to 180°C

Weight: ≈ 25 g

Total movement: 5 mm ± 0.2 mm

Tractive force: > 0.5 N, slip < 50 %

Loading capacity (x, y): ≤ 300 g

Max. step size: 400 nm ± 15 %

Min. step size: 40 nm ± 15 %

Standard deviation of single step: < ± 25 nm

Differential lateral run-out: < ± 0.1 µm travel

Integral lateral run-out: < ± 15 µm for 5 mm travel