Probe module coarse positioning: 
XYZ = 5 mm x 5 mm x 3 mm, piezo-electric inertia drives

STM fine positioning / scan range:
XYZ ~ 1 µm x 1 µm x 0.3 µm @ LHe

STM resolution:
Atomic resolution, Z-stability better 10 pm @ LHe

STM preamplification:
3 nA / 330 nA ranges lowest STM imaging current < 5 pA Omicron SPM PRE 4E

STM preamplifiers switch:
Signal re-routing from STM pre-amplifier to external BNC connector, remote or TTL control Omicron CSW4 switch

SEM resolution:
30 nm @ LHe 17 mm working distance, in lens SED

SEM XY positioning:
XY = 4 mm x 4 mm, Z = 3 mm External XY manipulator

Probe / tip exchange:
In-vacuum spring loaded tip carrier (non-magnetic) exchange by wobble-stick

Sample and tip storage:
28 storage positions inside analysis chamber

Sample and tip transfer:
Fast entry lock with 5 transfer positions

Sample stage coarse positioning:
XY = 4 mm x 4 mm, piezo-electric inertia drives

Sample exchange:
In-vacuum wobble-stick transfer

Sample Size:
10 mm x 10 mm (Omicron standard sample flat plates)
4 mm x 4 mm addressable by sample stage motor

Sample temperature measurement:
Si diode sensor at sample stage

Base temperatures: T < 5 K, 77 K, 300 K

LHe and LN₂ Holding time: > 36 h

Initial cool down time (300K to LHe): < 9 h

Cool down time (77K to LHe): < 2 h

Max. bakeout temperature: 150°C (incl. UHV Gemini column)

Electrical sample connection: Sample electrical insulated (access via BNC connector)

Base pressure: < 3 x 10^-10 mbar (@ 300 K)

Electrical probe connection: Low noise coaxial cable with floating shield

Superconducting magnetic coil: 25 mT (vertical) @ LHe

Control electronics: Matrix SPM control system for 4 SPM's

Note: Specifications and descriptions contained in this website are subject to alteration without notice. For guaranteed specifications please inquire official documentation.