The AFM Technology of the Variable Temperature SPM is based on more than 20 years of experience in Atomic Force Microscopy in UHV. It has been continuously developed and improved. The classical Beam Deflection AFM for contact and non-contact AFM offers the flexibility for many operational modes and different cantilever types. For example high resolution AFM, Friction Force Microscopy, Electrostatic Force Microscopy (EFM), Scanning Kelvin Probe Microscopy (SKPM) and Magnetic Force Microscopy (MFM) are available. The bandwidth of the AFM signal detection has been increased to 2 MHz to allow the use of stiff cantilevers and operation at higher resonance modes. The new “QPlus” sensor, based on a tuning fork design, is today extending the possible application range of the Large Sample SPM.