• Guaranteed detector current ≥ 10 pA at 1.0 meV resolution (FWHM)
• Employs new electrostatic deflectors with controlled angular aberrations
• Low noise digital control electronics with menu-driven software
• User selectable scan range up to 50 eV 
• Ultrahigh resolution of 0.5 meV FWHM

The ELS 5000 is a state-of-the-art spectrometer based on the development by Professor Harald Ibach and his co-workers at the FZ, Jülich; Germany. The instrument is capable of energy resolution down to 0.5 meV under optimal conditions. The ELS 5000 is manufactured by LK Technologies per a worldwide licensing agreement with the FZ.

Omicron integrates the ELS 5000 into the, providing the best commercial EELS instrument combined with Omicrons SPM and electron spectroscopy products. This approach allows not only dedicated EELS with ultimate performance, but also the complementary analysis with XPS, UPS, STM, AFM and other techniques within one UHV system.