The EBV-Series of E-Beam evaporators offer higher capacities (up to 100c) and higher power electron beam evaporators (up to 10kW) for larger substrate sizes (up to 4 Inch) and high flux rates (some Angstroem/s).

Vertically oriented compact UHV electron beam evaporator with DN63CF (4.5" OD) mounting flange and 4 cc / 5 cc hearth volume.

• High purity e-beam evaporation
• 270° beam deflection 
• 3 kW power
• High frequency x-y-beam deflection system