The EBV-Series of E-Beam evaporators offer higher capacities (up to 100c) and higher power electron beam evaporators (up to 10kW) for larger substrate sizes (up to 4 Inch) and high flux rates (some Angstroem/s).
Horizontally mounted UHV electron beam evaporator on a DN150CF/ DN200CF/DN250CF (8"/10”/12” OD) mounting flange with 40 cc or 100 cc hearth volume.
- 270° beam deflection
- Up to 10kW power
- Large hearth capacity (up to 100cc)
- High frequency x-y-beam deflection system